
Gases for Semiconductor Manufacturing and Fabrication
At INOX Air Products, we deliver an extensive portfolio of ultra-high-purity specialty gases, bulk solutions, as well as onsite generation of gases, underpinned by a robust and reliable supply chain. Our offerings of gases used in semiconductor manufacturing ensure producers benefit from the highest quality standards, precision, and sustainability, supporting a seamless and efficient production process.
INOXAP’S Material & Technology Overview For Semiconductor Fabs
The semiconductor industry is among the most dynamic, complex, and fiercely competitive markets globally. As the sector expands, the need for ultra-pure gases and chemicals intensifies, especially gases used in semiconductor manufacturing. The semiconductor gases supply chain is a complex network of production, distribution, and delivery of specialty semiconductor manufacturing gases, critical to high-quality chip and device manufacturing. Therefore, close collaboration, efficient logistics, and robust safety protocols are essential for a reliable supply of gases for chip manufacturing and electronic gases.


Our Product Offerings
- Silicon Semiconductor
- Compound Semiconductors
- PV
- Mutipurpose
- Others
CVD
Silane
Diborane
Germane
Silicon Tetrafluoride
Ammonia
Phosphine
Dichlorosilane
Disilane
Tungsten Hexafluoride
Propylene
Cleaning & Etching
Nitrogen Trifluoride
Hexafluoro Ethane
Hexafluoro-1,3-butadiene
Tetrafluoromethane
Carbonyl Sulfide
Difluoromethane
Sulfur Hexafluoride
Boron Trichloride
Carbon monoxide
Octafluoro Propane
Octafluorocyclopentene
Trifluoromethane
Pentafluoroethane
Methyl Fluoride
Chlorine
Hydrogen Bromide
Ion Implant
Arsine
Boron Trifluoride
Germanium tetrafluoride
Arsine Mixtures
Boron Trifluoride
Germanium Tetrafluoride
Phosphine
Silicon Tetrafluoride
Hydrogen Selenide
Phosphine Mixtures
Silicon Tetrafluoride
Compound Semiconductors
Arsine
Ammonia
Phosphine
PV
Silane
Diborane
Ammonia
Nitrogen Trifluoride
Phosphine
Germane
Hydrogen Selenide
Sulfur Hexafluoride
Nitrous Oxide
Mutipurpose
Nitrogen
Argon
Carbon Dioxide
Oxygen
Helium
Nitrous Oxide
Others
Nitric Oxide
Deuterium
Helium+Oxygen Mixture Gas
Nitrogen+Hydrogen
Mixture Gas
Hydrogen
Argon+Oxygen Mixture Gas
Argon+Methane Mixture Gas
Total Gas Management
Total Gas Management (TGM) involves overseeing the entire lifecycle of speciality and electronic gases, from production and transportation to distribution and consumption. It focuses on optimizing efficiency, safety, and sustainability through processes like monitoring production rates, managing pipelines, ensuring regulatory compliance, and using advanced technologies for real-time monitoring. TGM also includes risk management, demand forecasting, and reducing environmental impact, all aimed at ensuring safe, reliable, and efficient operations of gases for semiconductor manufacturing across the supply chain. Additionally, it ensures precise handling of every gas used in semiconductor applications to maintain product quality and operational safety.
Reliable Bulk Gas Solutions for Semiconductor Manufacturing
Semiconductor manufacturers rely on a secure supply of essential bulk gases, including Nitrogen (N2), Oxygen (O2), Argon (Ar), Hydrogen (H2) and Helium (He). At INOXAP, we provide comprehensive gases for semicon manufacturing, ensuring uninterrupted supply, consistent quality, and optimal purity across production processes. Our expertise includes design and installation services for:
- Bulk storage tanks
- Evaporators
- Purifiers
- Filtration systems
- Ultra-high-purity distribution systems
The numerous benefits of bulk gas solutions include a reliable supply of gases for semicon manufacturing, enhanced manufacturing efficiency, reduced downtime, improved product quality, and customized solutions tailored to unique customer needs.
On-site Gas Generation Solutions for Semiconductor Manufacturing
We offer our customers onsite gas generation solutions since large volumes of high-purity gases, including Nitrogen (N2), Oxygen (O2), Hydrogen (H2) and Compressed Dry Air (CDA) are critical for operations. On-site generation of these gases provides significant benefits for semiconductor manufacturers, ensuring a constant and reliable supply of gases for semiconductor manufacturing, reduced transportation costs, increased production efficiency, enhanced product quality, and customized solutions for unique customer needs. Our systems also guarantee a consistent supply of high-purity gas for semiconductor, minimizing downtime and optimizing production.
A Robust Supply Chain: Delivering On Time With Certainty
We deliver a comprehensive portfolio of ultra-high-purity gases for semiconductors, backed by a robust and reliable supply chain to ensure precision and performance at every stage. Our supply chain relies on ISO Packages, Cylinders, Mixed Gases, Tube Trailers, Bulk Cryogenic Liquid, On Site/Over-The-Fence Gas Solutions and Bulk Special Gases.
Customers We Serve
Semiconductor manufacturers need a reliable and responsive partner with a wide reach and the technical capability to safely supply semiconductor manufacturing gases, ensure the highest quality, manage costs, reduce environmental impact, and drive innovation for the future. At INOX Air Products, we are the leading manufacturer of Industrial gases committed to maintaining a sustainable and scalable value chain for the burgeoning semiconductor industry in India. We have been a supplier of choice for high-purity gases for chip manufacturing to numerous solar cell, semiconductor and electronic industry manufacturers in India, and through our JV partner Air Products, in China, USA, Taiwan, South Korea, Ireland, Israel, Malaysia, and the EU, with over 100 installations in this segment.
For more information, email us at info@inoxap.com or contact your INOX Air Products Sales Coordinator.







